Ypsilanti-based Nanogetters, a subsidiary of Integrated Sensing Systems Inc., announced Tuesday the award of United States Patent No. 7,789,949 for new applications of its thin films used in micro-electro-mechanical systems (MEMS).
The patent covers the application of thin film toward improved vacuum packaging, gas purification and flat panel displays.
The new patent enables the thin film “getters” and carbon nanotubes to be coupled with conventional bulk getters and desiccants to cover a broad range of purification and hermetic packaging approaches.
It can also incorporate sensors to indicate the real-time performance of a smart getter or solid-state vacuum pump and gas purifier. A thin transparent getter is disclosed in the patent for display and other viewing applications.
In MEMS parlance a “getter” is a material that absorbs other materials — in this case, unwanted gases or moisture that can foul up MEMS manufacturing processes.
For more information, visit www.nanogetters.com .
Integrated Sensing Systems builds advanced MEMS technologies for industrial, medical devices, microfluidic and scientific analytical sensing applications. Founded in 1995, ISSYS is one of the oldest independent MEMS companies in the U.S.
More at www.mems-issys.com.
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